钄″悍鍏夊(xu茅)鑷鐮旂櫦(f膩)銆佽ō(sh猫)瑷�(j矛)銆佺敓鐢�(ch菐n)鐨勫崐灏�(d菐o)楂旀韩鎺ц嚭(t谩i)锛岄噰鐢�纰插寲閴嶄綔鐐� TEC 鏍稿績绲勪欢銆傞珮婧剨鏂欎娇鏍稿績鍏冧欢姣斿競鍫�(ch菐ng)鍚岄鍨嬭ō(sh猫)鍌欒�愰珮婧柧鍊兼彁鍗� 80鈩冧互涓娿�備娇鐢ㄩ櫠鐡烽殧鐔辨潗鏂欎娇鑷�(t谩i)楂旀湰韬�鍘氬害闄嶄綆 20%銆�
1銆佷富瑕佺敤閫旓細灏�(du矛)璁婃韩閫熷害闇�姹傝純楂樼殑婧害娓�(c猫)瑭�锛屽皪(du矛)鍣煶銆� 闇囧嫊(d貌ng)銆�寤㈡埃绱勬潫鍤�(y谩n)鏍肩殑婧害娓�(c猫)瑭�
2銆佹渶楂樿畩婧�熷害锛�2鈩�/s銆�
3銆佺敘(ch菐n)鍝佺壒榛�(di菐n)锛氶珨绌嶅皬 锛岃畩婧�熺巼楂樸�佺劇(w煤)闇囧嫊(d貌ng)銆佷綆鍣伈銆�
鍗婂皫(d菐o)楂斿喎鐔辫嚭(t谩i)鑸囧悇椤為’寰�閺°�佸厜璀滃剙銆佹巸鎻忛浕閺＄瓑鍏夊(xu茅)鍎�鍣ㄨō(sh猫)鍌欒伅(li谩n)鐢�锛岄��(j矛n)琛岃畩婧笅鐨勫厜瀛�(xu茅)瑙�瀵熷強娓�(c猫)瑭︺��
瀵�(sh铆)鐝�(xi脿n)妯ｅ搧闁�(k膩i)鏀惧紡 / 姘ｅ瘑 / 鐪熺┖鐠�(hu谩n)澧冧笅鐨勮畩婧厜瀛�(xu茅)瑙�瀵熷強娓�(c猫)瑭︺�傚彲閬告搰鑵斿姘ｅ瘑\鐪熺┖銆�
鐪熺┖搴﹀彲閬�(d谩) 10^ −4 mbar銆傛敮鎸侀澶栧鍔� 4~8 璺帰閲濅互閫�(j矛n)琛屼笉鍚屾韩搴︿笅鐨勯浕瀛�(xu茅)娓�(c猫)瑭︺��
绲勬厠(t脿i)灞忔帶鍒剁晫闈�
